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TSV Wafer 
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TSV Wafer 

· TSV Wafer 

§ 10 x 100um Void free filling

§ Min. 40um pitch of micro bump

§ 2-layer RDL routing layout

§ RDL Line/Space: min.10um/10um

§ Refilling Materials: Cu and Polysilicon


· Process Capabilities

§ Make holes

§ Refilling

§ CMP

§ Wafer thinning

§ Low cost via reveal

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